CAJ | 학술논문

小型磁偏转质谱计因稳定性好、定量性好、丰度灵敏度高、结构简单、体积小、功耗低等特性，广泛应用于诸多领域实现原位实时气体成分分析。首先介绍了单聚焦磁偏转质谱计、串联式双聚焦磁偏转质谱计和正交式双聚焦磁偏转质谱计三种磁偏转质谱计的工作原理和特点，并对其最新研究现状进行了综述，最后介绍了微机电系统（ MEMS）技术在质谱计小型化中的应用并对小型质谱计的发展方向进行了分析。
소형자편전질보계인은정성호、정량성호、봉도령민도고、결구간단、체적소、공모저등특성，엄범응용우제다영역실현원위실시기체성분분석。수선개소료단취초자편전질보계、천련식쌍취초자편전질보계화정교식쌍취초자편전질보계삼충자편전질보계적공작원리화특점，병대기최신연구현상진행료종술，최후개소료미궤전계통（ MEMS）기술재질보계소형화중적응용병대소형질보계적발전방향진행료분석。
The miniature sector Mass Spectrometer has been deployed for many real-time in-situ analysis applications due to its simplicity, high sensitivity, small size, low power consumption, stability and suitability to harsh environments. The three types of sector Mass Spectrometers are described and their development and applications are introduced.Those are signal-focusing magnetic sector Mass Spectrometers , tandem field double-focusing sector Mass Spectrometer and crossed elec-tric and magnetic fields or E×B superimposed field sdouble-focusing sector Mass Spectrometer .Micro-electromechanical Sys-tems(MEMS) applied to Mass Spectrometer are noted and the possible future development of miniature Mass Spectrometer is analyzed .