CAJ | 학술논문

为实现高灵敏度微环谐振腔传感器,开展了光波导模式的理论研究。根据微环谐振腔的输出光强随有效折射率变化的规律,分析了耦合因子和衰减因子对非对称耦合微环谐振腔灵敏度的影响,以及波导间距与交叉耦合因子的关系,确立了波导间距与器件灵敏度的对应关系。仿真优化结果表明,当衰减因子为0.99,自耦合系数为0.9535,波导间距为0.13μm时,器件灵敏度的归一化最大灵敏度可达0.879。研究结果可为高灵敏度双直波导微环谐振腔的实现提供理论依据。
위실현고령민도미배해진강전감기,개전료광파도모식적이론연구。근거미배해진강적수출광강수유효절사솔변화적규률,분석료우합인자화쇠감인자대비대칭우합미배해진강령민도적영향,이급파도간거여교차우합인자적관계,학립료파도간거여기건령민도적대응관계。방진우화결과표명,당쇠감인자위0.99,자우합계수위0.9535,파도간거위0.13μm시,기건령민도적귀일화최대령민도가체0.879。연구결과가위고령민도쌍직파도미배해진강적실현제공이론의거。
In order to realize high sensitivity microring resonator sensor, the coupled mode theory of the waveguides was studied. The influences of coupling coefficients and attenuation factors on the sensitivity of asymmetrically coupled microring resonator are analyzed based on the fact that micror-ing resonator's light intensity changes with the effective refractive index. The relationship between the waveguide gap and the cross-coupling coefficient was analyzed and that between the waveguide gap and the device sensitivity is established. The optimizied simulation results show that the normal-ized maximum value of thedevice sensitivity can reach 0.879 when attenuation factor is 0.99 , self-coupling coefficient 0.953 5, and waveguide gap 0.13 μm, respectively. The research results pro-vide the theoretical basis for the realization of high sensitivity microring resonator with double straight waveguides.