CAJ | 학술논문

研究了不同生长温度对分子束外延设备在蓝宝石衬底上外延A1N薄膜时对薄膜样品晶体质量和表面形貌的影响。研究发现：随着生长温度的提高，RHEED条纹更加纤细、更加细锐；在低温下，A1N表面有密集的小岛状晶粒结构，但随着温度的升高，小岛之间开始聚合，并形成大范围的原子力台阶，表明A1N薄膜在高温下有良好的二维生长模式；（002）和（102）面XRD半高宽结果进一步表明A1N薄膜的二维生长模式，且在高温下，A1N薄膜中的刃型位错密度大大减小。说明提高生长温度有助于提高A1N薄膜的晶体质量，获得平坦的表面。
연구료불동생장온도대분자속외연설비재람보석츤저상외연A1N박막시대박막양품정체질량화표면형모적영향。연구발현：수착생장온도적제고，RHEED조문경가섬세、경가세예；재저온하，A1N표면유밀집적소도상정립결구，단수착온도적승고，소도지간개시취합，병형성대범위적원자력태계，표명A1N박막재고온하유량호적이유생장모식；（002）화（102）면XRD반고관결과진일보표명A1N박막적이유생장모식，차재고온하，A1N박막중적인형위착밀도대대감소。설명제고생장온도유조우제고A1N박막적정체질량，획득평탄적표면。
In this paper, we studied how did the growth temperature affect the crystal quality and sur- face morphology of A1N films grown by molecular beam epitaxy. RHEED streaks become more and more slender with the increase of growth temperature. By means of AFM images, we found that in low temperature, there are lots of island-like grain structures on the A1N films surface. And the island be- gan to aggregate together and form a wide range of atomic steps with improving the growth tempera- ture. All of this indicate that there is a good two-dimensional growth mode. The results of XRD further illustrate the good two-dimensional growth mode. The density of edge dislocation in the A1N films has greatly reduced in the high growth temperature. All of the above mentioned showed that increasing the growth temperature helps to improve the crystal quality and obtain a flat surface.