CAJ | 학술논문

研究了一种采用MEMS技术实现的含有红外发射源和探测单元的片上集成红外气体传感器芯片。通过理论分析证明了探测器和红外发射源可以集成在同一衬底上的可行性，采用正面刻蚀和背面ICP深刻蚀硅工艺实现红外发射元和探测单元的悬空热隔离结构，可以使红外发射源和探测器同时工作在较好的性能状态下。通过对红外气体传感器的红外发射源和探测单元的测试，表明两种单元均可以正常工作，验证了这种集成工艺的可行性。
연구료일충채용MEMS기술실현적함유홍외발사원화탐측단원적편상집성홍외기체전감기심편。통과이론분석증명료탐측기화홍외발사원가이집성재동일츤저상적가행성，채용정면각식화배면ICP심각식규공예실현홍외발사원화탐측단원적현공열격리결구，가이사홍외발사원화탐측기동시공작재교호적성능상태하。통과대홍외기체전감기적홍외발사원화탐측단원적측시，표명량충단원균가이정상공작，험증료저충집성공예적가행성。
An integrated-infrared gas sensor chip including infrared emitter and detector based on MEMS technology is studied.It’s proved to be feasible that it can integrate infrared emitter and detector on the same substrate.It can en-sure that infrared emitter and detector work under good condition through suspended micro-bridge structure by using positive etching and back ICP deep etching.The feasibility of this process is verified after the test of infrared emitter and detector.