CAJ | 학술논문

为实现动静态特性理想的压电微位移器控制,提出一种前馈控制和PI控制相结合的微细位移控制算法。对该压电微位移器进行迟滞特性实验测试,以实验数据为基础建立了迟滞特性的Preisa-ch模型,采用比例环节作为前馈控制器, PI控制作为反馈控制环节,构成复合控制。仿真结果表明：系统阶跃响应稳态误差小于0.4μm,调节时间小于2ms,能够满足精密加工要求。
위실현동정태특성이상적압전미위이기공제,제출일충전궤공제화PI공제상결합적미세위이공제산법。대해압전미위이기진행지체특성실험측시,이실험수거위기출건립료지체특성적Preisa-ch모형,채용비례배절작위전궤공제기, PI공제작위반궤공제배절,구성복합공제。방진결과표명：계통계약향응은태오차소우0.4μm,조절시간소우2ms,능구만족정밀가공요구。
In order to achieve the ideal static and dynamic characteristics of piezoelectric micro-shifter con-trol, a tiny displacement control algorithm base on the combination of feedforward control and PI control is presented. The experiment of the hysteresis characteristics for the piezoelectric micro-shifter is carried out in order to establish the Preisach model of the hysteresis characteristics, Proportion model is designed as a feed-forward, PI control output is modified, a composite control is developed. Simulation result shows that :as for the step response,the steady-state error is less than 0. 4μm, the adjust time is about 2ms, which meet the requirements of the precise machining.