CAJ | 학술논문

　　光栅测量技术作为高分辨率测量的一种手段，随着超精密加工技术的发展受到人们越来越多的关注。本文提出了一种新的处理方法用于检测和补偿相位，提高光栅传感器的分辨率，减少了细分误差。该方法主要使用向量模式下的CORDIC算法对两路信号的相位进行检测，并获得其它们之间的相位偏差。再用它的旋转模式，补偿相位偏差信号。整个过程只用到基本的加法和移位操作，易于硬件实现。
　　광책측량기술작위고분변솔측량적일충수단，수착초정밀가공기술적발전수도인문월래월다적관주。본문제출료일충신적처리방법용우검측화보상상위，제고광책전감기적분변솔，감소료세분오차。해방법주요사용향량모식하적CORDIC산법대량로신호적상위진행검측，병획득기타문지간적상위편차。재용타적선전모식，보상상위편차신호。정개과정지용도기본적가법화이위조작，역우경건실현。
As a means of high-resolution measurements, the grating measurement technology is drawing more and more attention as the development of ultraprecision machining technology. In this paper a new method of phase detection and compensation was proposed. In order to improve the resolution of the grating sensor and reduce the subdivision error, CORDIC algorithm is used mainly to detect the phase of the two channels and their phase deviation is obtained. Under the vector mode in this method. Under the rotation the phase deviation is compensated. Because only basic plus and shift operations are used in the whole process, the hardware implementation is very easy.