CAJ | 학술논문

　　为了减小激光器双腔放电时间的相对抖动、稳定激光器输出能量，采用闭环控制回路电压泄放方法，设计了一套主振荡功率放大结构准分子激光谐振充电高精度电压控制方案。通过对电容电压取样处理，动态监测储能电容电压，当电容电压大于目标电压时，由泄放电路泄放电压至目标值，得到高精度的充电电压，使用此电压控制方案后，充电电压的波动由±1.67‰减小到±0.83‰。结果表明，该方案很好地提高了谐振电源储能电容上的电压精度，减小了激光器双腔放电时间的相对抖动，并为后期的激光器能量输出稳定控制打下良好基础。
　　위료감소격광기쌍강방전시간적상대두동、은정격광기수출능량，채용폐배공제회로전압설방방법，설계료일투주진탕공솔방대결구준분자격광해진충전고정도전압공제방안。통과대전용전압취양처리，동태감측저능전용전압，당전용전압대우목표전압시，유설방전로설방전압지목표치，득도고정도적충전전압，사용차전압공제방안후，충전전압적파동유±1.67‰감소도±0.83‰。결과표명，해방안흔호지제고료해진전원저능전용상적전압정도，감소료격광기쌍강방전시간적상대두동，병위후기적격광기능량수출은정공제타하량호기출。
To reduce fluctuation of discharging time of both the cavity in a master oscillator power amplifier ( MOPA) excimer laser and obtain stable laser output energy , a high precision voltage control scheme was designed based on a closed loop controlling circuit .i.e., monitoring the voltage across the energy storage capacitor , when the capacitor voltage is larger than the objective voltage , the voltage discharging circuit discharges capacitance voltage to the objective voltage for getting a precision charging voltage .The results show that the fluctuation of charging voltage was reduced from ±1.67‰to ±0.83‰ by using the voltage control scheme .The precision of the voltage across the energy-storage capacitor in a resonance power supply can be improved;the relative jitter of the discharge time for both the laser cavities can be reduced by means of this method .It lays a good foundation for stable laser energy output .