CAJ | 학술논문

采用溶胶-凝胶浸渍提拉法制备出纳米钇-铝共掺杂氧化锌（ Y-AZO）透明薄膜，利用XRD、EDX、SEM和UV-VIS方法对薄膜进行了表征。结果表明：Y-AZO晶粒为六角纤锌矿结构，当Al掺杂量高于或等于Y掺杂量、退火温度为500℃时，得到不含杂质的均匀透明的薄膜，且薄膜在400～780 nm 可见光范围内平均透过率在87％以上。
채용용효-응효침지제랍법제비출납미을-려공참잡양화자（ Y-AZO）투명박막，이용XRD、EDX、SEM화UV-VIS방법대박막진행료표정。결과표명：Y-AZO정립위륙각섬자광결구，당Al참잡량고우혹등우Y참잡량、퇴화온도위500℃시，득도불함잡질적균균투명적박막，차박막재400～780 nm 가견광범위내평균투과솔재87％이상。
Transparent Al and Y codoped zinc oxide ( Y-AZO) thin films were deposited by a sol-gel dip-coating method.The structure and properties of these films were characterized by X-ray diffraction, scanning electron mi-croscopy/energy dispersive X-ray spectrometry , and UV-vis spectroscopy .The results proved:a hexagonal wurtzite structure was retained by Y-AZO films, while the doping ratio of Al was greater than or equal to the amount of Y and the annealing temperature was 500℃.The pure transparent thin film was available .The transmitttrance was a-bove 87%in the range of 400~700 nm visible region .