CAJ | 학술논문

提出高温有氧环境下介电性能测试方案，并对多孔Si3N4材料进行了7~18GHz高温有氧介电性能测试，得到了相应的随温度和频率变化数据及曲线。结果表明测试方案有效可行，测试结果可见，在7~18GHz频段，测试频率对多孔Si3N4材料的介电性能测试结果无明显影响。同时，在升温过程中，介电常数逐渐增加，增幅不大；损耗角正切增加较快，这与高温电子电导损耗及杂质离子电导损耗增大有关。
제출고온유양배경하개전성능측시방안，병대다공Si3N4재료진행료7~18GHz고온유양개전성능측시，득도료상응적수온도화빈솔변화수거급곡선。결과표명측시방안유효가행，측시결과가견，재7~18GHz빈단，측시빈솔대다공Si3N4재료적개전성능측시결과무명현영향。동시，재승온과정중，개전상수축점증가，증폭불대；손모각정절증가교쾌，저여고온전자전도손모급잡질리자전도손모증대유관。
Dielectric properties testing pro-posal under high temperature and aerobic condition is brought forward. Testing of porous silicon nitride under the frequencies of 7~18GHz is carried out, and data and curve with temperature and frequency change are obtained. It proves that the testing proposal is available. Results show that testing frequencies have no dominant effect on the dielectric properties of porous silicon nitride under the frequency of 7~18GHz. Dielectric constant grows mildly with temperature rising, but loss tangent increases quite fast, which relates to the conductance loss accretion of electron and impurity hydronium.