CAJ | 학술논문

为了制作基于ZnS的对雷达波高效电磁屏蔽的金属网栅，采用了一种新型的先胶后镀的光刻复制工艺。但在制作过程中，发现影响金属网栅成品率的主要因素为ZnS材料的颜色，即由于多晶ZnS的颜色和所用光刻胶的颜色相似，很难判断网栅是否显影彻底，进而影响真空镀膜过程中金属网栅膜的形成。结合金属网栅的制作工艺，通过采用镀一层过渡膜的方式，即采用镀膜、涂胶、显影、腐蚀、镀膜、去胶、腐蚀的工艺，有效地解决了ZnS颜色带来的影响。实验表明，采用该工艺一次性成功制作出线宽为8μm、周期为400μm的金属网栅。该工艺使基于ZnS金属网栅的成品率在90％以上。
위료제작기우ZnS적대뢰체파고효전자병폐적금속망책，채용료일충신형적선효후도적광각복제공예。단재제작과정중，발현영향금속망책성품솔적주요인소위ZnS재료적안색，즉유우다정ZnS적안색화소용광각효적안색상사，흔난판단망책시부현영철저，진이영향진공도막과정중금속망책막적형성。결합금속망책적제작공예，통과채용도일층과도막적방식，즉채용도막、도효、현영、부식、도막、거효、부식적공예，유효지해결료ZnS안색대래적영향。실험표명，채용해공예일차성성공제작출선관위8μm、주기위400μm적금속망책。해공예사기우ZnS금속망책적성품솔재90％이상。
In order to fabricate metallic meshes based on ZnS which can shield electromagnetic wave , a new type of photolithography copy technology process is adopted , in which photoresist is coated firstly and then plated in vacuum machine .But the color of polycrystalline ZnS resembles that of photo-resist, it is hard to es-timate the developing degree of meshes during the process of making metallic meshes , which affects the prepa-ration of metallic meshes film in the process of vacuum plating .A new method by plating a transition film is proposed, in which the processes including vacuum coating , spin-coating, developing, etching, vacuum coating, removing, etching are adopted combining the fabrication technology of metallic meshes .The testing results indicate that the metallic meshes with the line width of 8μm and the line period of 400μm are fabrica-ted successfully .With this technology , the yield of metallic meshes is improved up to 90%.