CAJ | 학술논문

利用直流磁控溅射法，采用氧化锌铝(98%ZnO+2%Al2O3)为靶材，在普通载玻片上制备了AZO (ZnO：Al)薄膜。采用X射线衍射仪、场扫描电镜对薄膜的结构及表面形貌进行了分析，采用分光光度计和四探针法对薄膜的光电学性能进行了测试。结果表明：控制好工艺参数可以制备出致密、均匀并具有良好的光电性能的AZO薄膜；并计算了带隙能量和折射率。
이용직류자공천사법，채용양화자려(98%ZnO+2%Al2O3)위파재，재보통재파편상제비료AZO (ZnO：Al)박막。채용X사선연사의、장소묘전경대박막적결구급표면형모진행료분석，채용분광광도계화사탐침법대박막적광전학성능진행료측시。결과표명：공제호공예삼수가이제비출치밀、균균병구유량호적광전성능적AZO박막；병계산료대극능량화절사솔。
AZO ( ZnO:Al) films were prepared on the glass substrate through the DC magnetron sputtering with the target of (98%ZnO+2%Al2O3). The structure morphology and optical and electronical properties of the AZO films were investigated by XRD, SEM, UV-visble spectrophotometry and four-point probe method. Experimental results indicate that a dense and even AZO film with better optical and electronical properties could be prepared by the regulation of processing parameter;gap-band energy and refractive index were calculated.