CAJ | 학술논문

通过磁控溅射氧化铝锌陶瓷靶材的方法在玻璃基片上制备 ZAO薄膜，研究了不同氧掺杂量对于ZAO膜电学及光学性能的影响，使用 X射线衍射仪衍射分析了薄膜相结构，使用四探针方阻仪测试薄膜的方阻，采用紫外可见分光光度计测试薄膜透过率。结果表明：在通入较低氧分量时对 ZAO薄膜结晶性能及光电性能没有太大的影响，但随着氧分量的增加 ZAO薄膜性能急剧下降。
통과자공천사양화려자도자파재적방법재파리기편상제비 ZAO박막，연구료불동양참잡량대우ZAO막전학급광학성능적영향，사용 X사선연사의연사분석료박막상결구，사용사탐침방조의측시박막적방조，채용자외가견분광광도계측시박막투과솔。결과표명：재통입교저양분량시대 ZAO박막결정성능급광전성능몰유태대적영향，단수착양분량적증가 ZAO박막성능급극하강。
The ZnO:Al ( ZAO ) films were deposited by magnetron sputtering of the ceramic target of ZnO doped with 2%( wt . ) A12O3 on glass substrates , and the effects of oxygen content were studied . The structural characteristics of the films were investigated by the X-ray diffractometry ( XRD ) . The resistance and transmittance of ZAO films were studied by the ultraviolet-visible spectrometer and four-point probe method . The results show that the properties of ZAO films decrease with the increase of oxygen content .