真空
真空
진공
VACUUM
2014年
1期
19-24
,共6页
陈柏恺%陈仕修%陈堃%赵小令
陳柏愷%陳仕脩%陳堃%趙小令
진백개%진사수%진곤%조소령
低气压%磁场条件%辉光等离子体%空心阴极%伏安特性%电子密度
低氣壓%磁場條件%輝光等離子體%空心陰極%伏安特性%電子密度
저기압%자장조건%휘광등리자체%공심음겁%복안특성%전자밀도
low pressure%magnetic field%glow discharge plasma%hollow cathode%volt-ampere characteristic
为掌握10-2 Pa~10-3 Pa的低气压、磁场条件下空心阴极辉光等离子体的特性及其与常规辉光放电伏安特性的区别,我们对其伏安特性和电子密度进行了测量。实验结果表明:低气压、磁场条件下空心阴极辉光放电的整个过程可分为三个不同阶段,即随着电流的增大,依次为起辉阶段、空心阴极放电阶段和反常辉光放电阶段。其中,起辉阶段与空心阴极放电阶段的伏安特性与常规辉光放电的伏安特性曲线不同,而反常辉光放电阶段类似。实验证实了电子密度随电流增大而增大的关系,实验结果表明,在轴线方向上,阳极附近的电子密度大于阴极附近的;在与轴线垂直的平面上,电子密度差别不大。
為掌握10-2 Pa~10-3 Pa的低氣壓、磁場條件下空心陰極輝光等離子體的特性及其與常規輝光放電伏安特性的區彆,我們對其伏安特性和電子密度進行瞭測量。實驗結果錶明:低氣壓、磁場條件下空心陰極輝光放電的整箇過程可分為三箇不同階段,即隨著電流的增大,依次為起輝階段、空心陰極放電階段和反常輝光放電階段。其中,起輝階段與空心陰極放電階段的伏安特性與常規輝光放電的伏安特性麯線不同,而反常輝光放電階段類似。實驗證實瞭電子密度隨電流增大而增大的關繫,實驗結果錶明,在軸線方嚮上,暘極附近的電子密度大于陰極附近的;在與軸線垂直的平麵上,電子密度差彆不大。
위장악10-2 Pa~10-3 Pa적저기압、자장조건하공심음겁휘광등리자체적특성급기여상규휘광방전복안특성적구별,아문대기복안특성화전자밀도진행료측량。실험결과표명:저기압、자장조건하공심음겁휘광방전적정개과정가분위삼개불동계단,즉수착전류적증대,의차위기휘계단、공심음겁방전계단화반상휘광방전계단。기중,기휘계단여공심음겁방전계단적복안특성여상규휘광방전적복안특성곡선불동,이반상휘광방전계단유사。실험증실료전자밀도수전류증대이증대적관계,실험결과표명,재축선방향상,양겁부근적전자밀도대우음겁부근적;재여축선수직적평면상,전자밀도차별불대。
In order to know the characteristics of hollow cathode glow plasma under the condition of low pressure ( 10-2Pa~10 -3Pa ) and magnetic field , and the differences between the volt-ampere characteristic under those conditions and the conventional glow discharge , we measured the volt-ampere characteristic and electron density . The experimental results show that the whole discharge process of the hollow cathode glow discharge under the condition of low pressure and magnetic field can be divided into three stages . From the low current to the high current , they are starter stage , hollow cathode discharge stage and abnormal glow discharge stage . In the starter stage and hollow cathode discharge stage , the volt -ampere characteristic is different from the conventional glow discharge , while in the abnormal glow discharge stage , the two volt-ampere characteristics are similar to each other . The results confirmed that the electron density increases with the increasing of glow current . And in the axial direction , the electron density near the anode is greater than that near the cathode; in the vertical plane of the axis , the electron density changes little .