声学扫描检测系统的运动控制方法研究
성학소묘검측계통적운동공제방법연구
The Study of Motion Control Method Used on Acoustic Scanning Inspection System
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    电子工业专用设备 전자공업전용설비
    EQUIPMENT FOR ELECTRONIC PRODUCTS MANUFACTURING
    2014年 1期 19-23 ,共5页

    黄晓鹏%张继静%吕荣华

    황효붕%장계정%려영화

    声学扫描检测%运动控制%闭环控制 聲學掃描檢測%運動控製%閉環控製
    성학소묘검측%운동공제%폐배공제
    Scanning acoustic inspection%Motion control%Closed-loop control
    介绍了一种典型的声学扫描检测系统所采用的运动控制方法，重点对扫描轴的精度调节进行了研究，提出了一种具体的PID 调节方法，实现了系统的高精度控制。
    개소료일충전형적성학소묘검측계통소채용적운동공제방법，중점대소묘축적정도조절진행료연구，제출료일충구체적PID 조절방법，실현료계통적고정도공제。
    The article introduced a typicalm otion controlmethod used in Scanning Acoustic Inspection System . Focused on the research of precision adjustm ent of scanning axis, put forw ard a concrete method of PID adjustment,and realized the high precision control.
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