CAJ | 학술논문

简要介绍了LTCC腔体和微流道的用途、结构形式以及腔体的制作方法。详细分析了LTCC空腔在层压和共烧时产生变形的原因。重点阐述了腔体填充材料控制工艺形变的方法，碳基牺牲材料的特性、作用以及控制腔体变形的理论基础。通过工艺试验验证了碳基牺牲材料的有效性。说明采用合理的填充材料、恰当的工艺技术可以制作出满足要求的空腔结构。
간요개소료LTCC강체화미류도적용도、결구형식이급강체적제작방법。상세분석료LTCC공강재층압화공소시산생변형적원인。중점천술료강체전충재료공제공예형변적방법，탄기희생재료적특성、작용이급공제강체변형적이론기출。통과공예시험험증료탄기희생재료적유효성。설명채용합리적전충재료、흡당적공예기술가이제작출만족요구적공강결구。
Briefly introduce the structure and the application of LTCC cavity and microfluidics, as well as the fabrication method of LTCC cavity. Analyze the reason of LTCC cavity deformation when it is laminated and sintered. Expound the method of controlling cavity deformation with filling material, characteristics and functions of carbon sacrificial material, and theoretical basis of controlling cavity deformation. The efficiency of the carbon sacrificial material was verified by the test. It is found that reasonable filling materials and appropriate technology can fabricate qualified cavity and microfluidics.