内蒙古民族大学学报：自然科学版
內矇古民族大學學報：自然科學版
내몽고민족대학학보：자연과학판
Journal of Inner Mongolia University for the Nationalities(Natural Sciences)
2012年
1期
1-5
,共5页
ACAT程序%溅射产额%入射能量%YAMAMURA半经验公式
ACAT程序%濺射產額%入射能量%YAMAMURA半經驗公式
ACAT정서%천사산액%입사능량%YAMAMURA반경험공식
ACAT code%Sputtering yieldI%ncident energy%YAMAMURA Semiempirical formula
简单介绍了Sigmund的理论和一些基于此理论的其它经验公式,描述了YAMAMURA半经验公式的发展过程.采用ACAT模拟程序和YAMAMURA半经验公式模拟和计算了铈、铽和铥等的溅射产额,并对两种结果进行了对比和分析.由分析结果估计了YAMAMURA半经验公式计算铈的经验参数,采用该参数的公式计算和模拟进行了比较,结果符合的很好.
簡單介紹瞭Sigmund的理論和一些基于此理論的其它經驗公式,描述瞭YAMAMURA半經驗公式的髮展過程.採用ACAT模擬程序和YAMAMURA半經驗公式模擬和計算瞭鈰、鋱和銩等的濺射產額,併對兩種結果進行瞭對比和分析.由分析結果估計瞭YAMAMURA半經驗公式計算鈰的經驗參數,採用該參數的公式計算和模擬進行瞭比較,結果符閤的很好.
간단개소료Sigmund적이론화일사기우차이론적기타경험공식,묘술료YAMAMURA반경험공식적발전과정.채용ACAT모의정서화YAMAMURA반경험공식모의화계산료시、특화주등적천사산액,병대량충결과진행료대비화분석.유분석결과고계료YAMAMURA반경험공식계산시적경험삼수,채용해삼수적공식계산화모의진행료비교,결과부합적흔호.
The Sigmund’s theory and other empirical formulas based on this theory were briefly introduced.The development of YAMAMURA’S Semiempirical formula was described.Sputtering yield’s of Ce,Tb,Tm was Simulated and calculated by using ACAT code and YAMAMURA’S Semiempirical formula,and the comparative analysis of the results obtained by the two metholds were given.In this paper,after estimated Semiempirical parameters of YAMAMURA’S Semiempirical formula for calculating Ce,we performed both the simulation and analytical calculation and found that the results were coincident each other very well.
