CAJ | 학술논문

提出一种新型的无阀机械微泵,它依靠微泵管道顶部铺设的压电薄膜阵列产生的超声行波来驱动微管道中的流体。根据超声行波驱动微流体的原理对微泵进行ANSYS有限元建模和CFX流固耦合计算,得到了选定模态下内边长为200μm的方形微泵管道中流体的动力黏度与微泵驱动能力的关系,以及驱动电压幅值和频率对管口流速的影响曲线。结果表明：驱动电压的幅值大小与管口流速成正比,且当驱动频率等于共振频率时驱动效果最明显;当流体动力黏度小于0.001Pa.s时微流体流速随黏度增大而线性增大,之后则缓慢减小。此外,通过CFX后处理得到了微管道中的截面流速矢量图,由矢量图可以看出,在行波驱动作用显著的部分流速分布呈现自微管顶部向下逐渐减慢的特点,而在行波驱动作用极微弱的部分则流速分布近似呈抛物线形状。
제출일충신형적무벌궤계미빙,타의고미빙관도정부포설적압전박막진렬산생적초성행파래구동미관도중적류체。근거초성행파구동미류체적원리대미빙진행ANSYS유한원건모화CFX류고우합계산,득도료선정모태하내변장위200μm적방형미빙관도중류체적동력점도여미빙구동능력적관계,이급구동전압폭치화빈솔대관구류속적영향곡선。결과표명：구동전압적폭치대소여관구류속성정비,차당구동빈솔등우공진빈솔시구동효과최명현;당류체동력점도소우0.001Pa.s시미류체류속수점도증대이선성증대,지후칙완만감소。차외,통과CFX후처리득도료미관도중적절면류속시량도,유시량도가이간출,재행파구동작용현저적부분류속분포정현자미관정부향하축점감만적특점,이재행파구동작용겁미약적부분칙류속분포근사정포물선형상。
A novel type of valveless mechanical micro--pump was proposed herein. It transported the liquid depending on the driving force of traveling wave which was produced by piezoelectric films fabricated on the top surface of the channel. Using finite element software, according to the principle of ultrasonic traveling wave driving,a model was structured and solved. The relationships among the ve- locity of microfluidic and driving factors such as the dynamic viscosity of liquid, the driving voltage amplitude and frequency were obtained for the first time under condition of the selected modal of square micro--pipe with a caliber of 200μm. The results show that the voltage amplitude is propor- tional to the flow velocity and the best driving efficiency is obtained on the resonance frequency;When the dynamic viscosity is below 0. 001Pa · s, the flow velocity will increase along with the rising viscos- ity while decrease above that value. In addition, the section velocity vector diagrams have been ob- tained, which illustrate that the flow velocity, under a remarkable traveling wave driving force, decrea- ses in the microchannel from ceiling to bottom gradually. On the contrary,it's nearly a parabolic shape where the traveling wave driving force is extremely faint.