电加工与模具
電加工與模具
전가공여모구
ELECTROMACHINING & MOULD
2013年
4期
28-31,35
,共5页
潘慧君%刘志东%黄赛娟%邱明波%田宗军
潘慧君%劉誌東%黃賽娟%邱明波%田宗軍
반혜군%류지동%황새연%구명파%전종군
半导体%电火花线切割加工%伺服控制%电流脉冲概率
半導體%電火花線切割加工%伺服控製%電流脈遲概率
반도체%전화화선절할가공%사복공제%전류맥충개솔
semiconductor%WEDM%servo control%current pulse probability
对当前基于金属加工的电火花伺服控制系统在半导体电火花加工中失效的原因进行了分析。由于半导体加工中采样电压不再只是放电通道电压,而是由放电通道电压、半导体体电阻压降和接触势垒压降之和组成,使系统无法准确识别加工状态,导致无法进行准确的伺服进给。对进给速度与电流脉冲概率的关系进行了研究,提出了一种全新的基于电流脉冲概率的半导体电火花加工伺服控制方法,对相关系统参数进行了优化,最终实现了半导体电火花高效、精密、稳定加工。
對噹前基于金屬加工的電火花伺服控製繫統在半導體電火花加工中失效的原因進行瞭分析。由于半導體加工中採樣電壓不再隻是放電通道電壓,而是由放電通道電壓、半導體體電阻壓降和接觸勢壘壓降之和組成,使繫統無法準確識彆加工狀態,導緻無法進行準確的伺服進給。對進給速度與電流脈遲概率的關繫進行瞭研究,提齣瞭一種全新的基于電流脈遲概率的半導體電火花加工伺服控製方法,對相關繫統參數進行瞭優化,最終實現瞭半導體電火花高效、精密、穩定加工。
대당전기우금속가공적전화화사복공제계통재반도체전화화가공중실효적원인진행료분석。유우반도체가공중채양전압불재지시방전통도전압,이시유방전통도전압、반도체체전조압강화접촉세루압강지화조성,사계통무법준학식별가공상태,도치무법진행준학적사복진급。대진급속도여전류맥충개솔적관계진행료연구,제출료일충전신적기우전류맥충개솔적반도체전화화가공사복공제방법,대상관계통삼수진행료우화,최종실현료반도체전화화고효、정밀、은정가공。
The failure reason of the EDM servo control systems based on metal processing when used in the machining of semiconductor is analyzed. Due to the sampling voltage semiconductor pro-cessing is no longer just discharge channels voltage, but the sum of the plasma channel voltage, the voltage drop on semiconductor body resistance and voltage drop of contact barrier, which makes the system unable to identify accurately the processing state, thus resulting in the failure of the servo feed. The relationship between feed speed and the probability of current pulse was studied, and a new semi-conductor EDM servo control based on current pulse probability method was put forward. The related system parameters were optimized, and finally the efficiency, precision and stability machining of semi-conductor by WEDM is realized.