CAJ | 학술논문

VO2薄膜的电阻温度系数TCR（Temperature Coefficient of Resistance，用α表示）随温度改变会发生显著变化。因此，以VO2薄膜为热敏材料的非制冷探测器微桥像元采用1/R-（-αI2）曲线来测量微桥热导时，如果使用固定TCR数值，必然会对测量结果带来偏差。本文采用TCR逐点矫正的方法测量了非制冷微桥热导，并分析了有效热导，实验中的最大热导矫正率达到20．08％。采用本方法可使非制冷探测器微桥的热导测试结果更为准确，也更具有实际应用价值。
VO2박막적전조온도계수TCR（Temperature Coefficient of Resistance，용α표시）수온도개변회발생현저변화。인차，이VO2박막위열민재료적비제랭탐측기미교상원채용1/R-（-αI2）곡선래측량미교열도시，여과사용고정TCR수치，필연회대측량결과대래편차。본문채용TCR축점교정적방법측량료비제랭미교열도，병분석료유효열도，실험중적최대열도교정솔체도20．08％。채용본방법가사비제랭탐측기미교적열도측시결과경위준학，야경구유실제응용개치。
TCR (Temperature coefficient of resistance,α)of the VO2 thin film changes with temperature. So when the thermal conductance of VO2 microbridge pixel is tested by using the 1/R(-αI2 )curve method,certain deviation oc-curs if the TCR is treated as a constant. The test on the microbridge thermal conductance of the uncooled detector is carried out by using the TCR corrected 1/R-(-αI2 )curve method and effective thermal conductance is analyzed. The biggest correction ratio reached 20. 08% in the experiment. This method makes the thermal conductance test of the uncooled detector more precise and more practical.