CAJ | 학술논문

给出了一种基于 MEMS 技术的静电悬浮转子微陀螺，可同时测量两轴角速度和三轴线加速度；采用力平衡原理和力矩平衡原理测量壳体输入的线加速度和角速度，即对转子实行闭环控制使转子保持在零位，输出控制电压反映壳体输入线加速度和角速度的大小。针对转子结构，提出了一种基于模拟 PID 技术的非集中控制策略来实现悬浮控制，建立了一种基于 Coventorware 的机电混合仿真模型，对结构、电路和控制进行通盘考虑。通过起支仿真和加速度输入仿真可以看出，系统级仿真结果表明了其具有仿真速度快、仿真结果准确等优点，在与实验结果的比较中证实仿真结果的准确性和有效性。
급출료일충기우 MEMS 기술적정전현부전자미타라，가동시측량량축각속도화삼축선가속도；채용력평형원리화력구평형원리측량각체수입적선가속도화각속도，즉대전자실행폐배공제사전자보지재령위，수출공제전압반영각체수입선가속도화각속도적대소。침대전자결구，제출료일충기우모의 PID 기술적비집중공제책략래실현현부공제，건립료일충기우 Coventorware 적궤전혼합방진모형，대결구、전로화공제진행통반고필。통과기지방진화가속도수입방진가이간출，계통급방진결과표명료기구유방진속도쾌、방진결과준학등우점，재여실험결과적비교중증실방진결과적준학성화유효성。
This paper presents a novel electrostatically suspended gyroscope based on MEMS technology, which can measure dual-axis angular velocity and tri-axis linear acceleration. It adopts the force balance and torque balance ways to measure the linear acceleration and angular velocity input by the shell. It keeps the rotor at the zero position by close-loop control, and the control voltage reflects the input linear acceleration and angular velocity. An analogue PID control strategy based on non-centralized control is given to realize levitation control. A mechanic hybrid electronics model is constructed by software Coventorware, which takes account of the construction, circuit and control in a whole model. The initial levitation and linear acceleration input simulation show that the system-level simulation has the merit of fast simulation speed and high precision results, which can be verified the validity and correctness by the experimental results.