CAJ | 학술논문

　　金丝热超声楔焊是微波毫米波模块射频互联的关键手段。采用三维电磁仿真软件对毫米波频段的金丝热超声楔焊进行了建模仿真，分析了金丝跨距、拱高和角度等物理参量对驻波的影响。针对模拟仿真优化后的热超声楔焊金丝互连结构，给出了金丝热超声楔焊表面状态优化、线型控制参数优化以及键合参数优化等相应的工艺优化措施，从而达到热超声楔焊金丝性能优化的目的。
　　금사열초성설한시미파호미파모괴사빈호련적관건수단。채용삼유전자방진연건대호미파빈단적금사열초성설한진행료건모방진，분석료금사과거、공고화각도등물리삼량대주파적영향。침대모의방진우화후적열초성설한금사호련결구，급출료금사열초성설한표면상태우화、선형공제삼수우화이급건합삼수우화등상응적공예우화조시，종이체도열초성설한금사성능우화적목적。
Gold wire thermo-sonic wedge bonding is the key means in the RF interconnection of microwave and millimeter wave modules. The three-dimensional electromagnetic simulation software was used to simulate analysis of bond-wire models. Then, the impacts of loop distance, loop height and angle of bond wires on the voltage standing wave ratio were also analyzed. Based on the simulation results, optimum processes such as surface state optimization of the bond interface, loop parameter and bond parameter optimization were provided. And then the optimum performance was obtained for gold wire thermo-sonic bonding process.