CAJ | 학술논문

　　根据压电陶瓷微位移器对驱动电源的需求，设计了压电驱动电源系统。详细介绍了电源系统中的数字电路部分和模拟电路部分，并对驱动电源的精度与稳定性进行了分析与改进。最后对驱动电源的性能进行了实验验证，实验结果表明：所设计的电源输出电压噪声低于0.43 mV、输出最大非线性误差低于0.024%、分辨率可达1.44 mV，能够满足高分辨率微位移定位系统中静态定位控制的需求。
　　근거압전도자미위이기대구동전원적수구，설계료압전구동전원계통。상세개소료전원계통중적수자전로부분화모의전로부분，병대구동전원적정도여은정성진행료분석여개진。최후대구동전원적성능진행료실험험증，실험결과표명：소설계적전원수출전압조성저우0.43 mV、수출최대비선성오차저우0.024%、분변솔가체1.44 mV，능구만족고분변솔미위이정위계통중정태정위공제적수구。
According to the requirement of the micro piezoelectric actuator for driving power supply,a piezoelectric actua?tor power supply system was designed. In this paper,the digital circuit and analog circuit in the power supply system were de?scribed in detail. The accuracy and the stability of the actuator power supply were analyzed and improved. Finally,the perfor?mance of the power supply was verified in experiment. The experimental results indicate that the output voltage noise of the de?signed power supply is lower than 0.43 mV,the maximum nonlinear output error is less than 0.024%,and the resolution can reach 1.44 mV,which can meet the requirement of static positioning control in the high resolution micro?displacement system.