航空精密制造技术
航空精密製造技術
항공정밀제조기술
AVIATION PRECISION MANUFACTURING TECHNOLOGY
2013年
4期
14-17
,共4页
刘勇%徐昌语%王帼媛%刘祎%张建明
劉勇%徐昌語%王幗媛%劉祎%張建明
류용%서창어%왕귁원%류의%장건명
波面激光干涉仪%超精密加工%测量
波麵激光榦涉儀%超精密加工%測量
파면격광간섭의%초정밀가공%측량
wave laser interferometer%ultra-precision machining%measurement
介绍了超精密加工的发展趋势和技术特点，介绍了波面激光干涉仪的测量原理及使用技巧，重点阐述了如何在超精密加工的多个环节，如工件检测、精密对刀、误差补偿中发挥波面激光干涉仪的作用。
介紹瞭超精密加工的髮展趨勢和技術特點，介紹瞭波麵激光榦涉儀的測量原理及使用技巧，重點闡述瞭如何在超精密加工的多箇環節，如工件檢測、精密對刀、誤差補償中髮揮波麵激光榦涉儀的作用。
개소료초정밀가공적발전추세화기술특점，개소료파면격광간섭의적측량원리급사용기교，중점천술료여하재초정밀가공적다개배절，여공건검측、정밀대도、오차보상중발휘파면격광간섭의적작용。
The development tends and technical features of the ultra-precision machining were discussed. The working principles of the wave laser interferometer were introduced. Its typical applications in the ultra-precision machining, such as workpiece measurement, precision tool setting and error compensation were presented.
