红外与激光工程
紅外與激光工程
홍외여격광공정
INFRARED AND LASER ENGINEERING
2013年
6期
1601-1606
,共6页
相位差异%波前传感%离轴三反光学系统
相位差異%波前傳感%離軸三反光學繫統
상위차이%파전전감%리축삼반광학계통
phase diversity%wavefront sensing%off-axis three-mirror reflecting optical system
分析了基于相位差异(Phase Diversity,PD)的波前传感技术的基本原理,针对该技术的目标函数自变量多、非线性程度较高等特点,提出基于遗传算法(Genetic Algorithm,GA)的改进相位差异技术。在传统目标函数的基础上增加了Tikhonov正则项,提高了算法的稳定性和收敛效率;对光学系统利用PD技术波前检测的噪声适应性进行了仿真分析;模拟了不同波前离焦量对检测精度的影响,获得最优的波前离焦相位值并应用于检测实验;利用PD技术分别对离轴三反光学系统的中心视场和边缘视场进行波前检测,并将解算得到的Zernike系数和波前图分别与干涉检验的结果进行对比。实验结果表明:相位差异技术与干涉检验的偏差小于0.013(RMS),其检测精度满足工程需求。
分析瞭基于相位差異(Phase Diversity,PD)的波前傳感技術的基本原理,針對該技術的目標函數自變量多、非線性程度較高等特點,提齣基于遺傳算法(Genetic Algorithm,GA)的改進相位差異技術。在傳統目標函數的基礎上增加瞭Tikhonov正則項,提高瞭算法的穩定性和收斂效率;對光學繫統利用PD技術波前檢測的譟聲適應性進行瞭倣真分析;模擬瞭不同波前離焦量對檢測精度的影響,穫得最優的波前離焦相位值併應用于檢測實驗;利用PD技術分彆對離軸三反光學繫統的中心視場和邊緣視場進行波前檢測,併將解算得到的Zernike繫數和波前圖分彆與榦涉檢驗的結果進行對比。實驗結果錶明:相位差異技術與榦涉檢驗的偏差小于0.013(RMS),其檢測精度滿足工程需求。
분석료기우상위차이(Phase Diversity,PD)적파전전감기술적기본원리,침대해기술적목표함수자변량다、비선성정도교고등특점,제출기우유전산법(Genetic Algorithm,GA)적개진상위차이기술。재전통목표함수적기출상증가료Tikhonov정칙항,제고료산법적은정성화수렴효솔;대광학계통이용PD기술파전검측적조성괄응성진행료방진분석;모의료불동파전리초량대검측정도적영향,획득최우적파전리초상위치병응용우검측실험;이용PD기술분별대리축삼반광학계통적중심시장화변연시장진행파전검측,병장해산득도적Zernike계수화파전도분별여간섭검험적결과진행대비。실험결과표명:상위차이기술여간섭검험적편차소우0.013(RMS),기검측정도만족공정수구。
The basic principles of wavefront sensin g based on phase diversity (PD) were analyzed. An improved PD based on genetic algorithm (GA) was proposed for the multiple variables and nonlinear character of PD's objective function. A Tikhonov regularization function was added to the traditional objective function, and the stability and convergence efficiency were improved. The noise adaptability of wavefront testing by PD technology was simulated, and effect of various wavefront defocuses on the testing precision of PD technology was analyzed. The best wavefront defocus which can make PD reach the highest testing precision, and it was selected to apply in testing experiment. PD technology was applied to wavefront testing of central and marginal field of view in off-axis three-mirror reflecting optical systems. The Zernike coefficients solved and wavefront maps were compared with interferometric results respectively. Experimental results showed that the testing precision of PD technology was less than 0.013 (RMS), and the precision can satisfy the requirement of engineering.