CAJ | 학술논문

　　随着人们对太阳能资源的开发和深入研究，作为其原材料供给的多晶硅行业也得到迅猛发展。在对多晶硅生产工艺改进的同时，其生产设备也得到相应的改进和更新。就改良西门子法多晶硅生产过程中的不同工序和不同工艺的主要生产设备进行探讨，比较其优缺点，并介绍相应的改进方法以获得更优的生产效率。
　　수착인문대태양능자원적개발화심입연구，작위기원재료공급적다정규행업야득도신맹발전。재대다정규생산공예개진적동시，기생산설비야득도상응적개진화경신。취개량서문자법다정규생산과정중적불동공서화불동공예적주요생산설비진행탐토，비교기우결점，병개소상응적개진방법이획득경우적생산효솔。
Along with development and further research of solar energy resources, the polysilicon industry as the supplier of the raw materials has gained rapid development. The polysilicon production process is continuously improved, at the same time the corresponding equipments get improvement and innovation. In this paper, main production equipments of different processes with modified siemens method were introduced, and their merits and demerits were also compared. At last, the improvements were put forward as to get higher efficiency.