活性环境空心阴极溅射特性与沉积Al2O3、ZnO掺杂和In2O3∶Mo薄膜的应用(下)
활성배경공심음겁천사특성여침적Al2O3、ZnO참잡화In2O3∶Mo박막적응용(하)
Reactive-environment, hollow cathode sputtering: Basic characteristics and application to Al2O3, doped ZnO, and In2O3∶Mo
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