计测技术
計測技術
계측기술
METROLOGY & MEASUREMENT TECHNOLOGY
2014年
3期
28-31
,共4页
MEMS惯性测量装置%温控系统%MEMS陀螺%MEMS加速度计
MEMS慣性測量裝置%溫控繫統%MEMS陀螺%MEMS加速度計
MEMS관성측량장치%온공계통%MEMS타라%MEMS가속도계
MEMS Inertia Measurement Unit%temperature-controlling system%MEMS gyroscope%MEMS accelerometer
以提高MEMS惯性测量装置( MIMU)的测量精度为目的,本文设计了一套温度控制系统和控制算法;通过对MIMU进行精密温控,改善了惯性器件的热环境,抑制了外界温度变化对MIMU的干扰,提高了MIMU的综合性能;测试结果验证了方案的有效性。
以提高MEMS慣性測量裝置( MIMU)的測量精度為目的,本文設計瞭一套溫度控製繫統和控製算法;通過對MIMU進行精密溫控,改善瞭慣性器件的熱環境,抑製瞭外界溫度變化對MIMU的榦擾,提高瞭MIMU的綜閤性能;測試結果驗證瞭方案的有效性。
이제고MEMS관성측량장치( MIMU)적측량정도위목적,본문설계료일투온도공제계통화공제산법;통과대MIMU진행정밀온공,개선료관성기건적열배경,억제료외계온도변화대MIMU적간우,제고료MIMU적종합성능;측시결과험증료방안적유효성。
In order to improve the measurement accuracy of MEMS Inertia Measurement Unit ( MIMU) , a temperature-controlling system is designed. The temperature in MIMU can be controlled accurately, and this is helpful to ameliorate the thermal environment of inertial sensors.The interference of environment temperature variability is decreased, and the performance of MIMU is improved. Finally, the effectiveness of the temperature-controlling scheme is verified.