CAJ | 학술논문

膜片式F-P腔光纤压力传感器是基于法布里-珀罗干涉原理,采用微电子机械系统( MEMS)技术加工而成。在实际应用中,不同的测试环境对传感器灵敏度的要求各不相同,如果针对不同灵敏度,分别采用MEMS工艺批量化生产,则会造成生产成本过高,经济化效益降低。本文利用湿法腐蚀的方法对传感器进行膜片减薄试验,在一定范围内提高了传感器的压力灵敏度,从而满足了不同的测试需求。膜片减薄后,传感器的灵敏度可达34.2 nm/kPa,压力标定曲线的线性度为0.9997,传感器的非线性误差为0.05%,能够实现0~120 kPa (绝压)范围内压力的准确测量。
막편식F-P강광섬압력전감기시기우법포리-박라간섭원리,채용미전자궤계계통( MEMS)기술가공이성。재실제응용중,불동적측시배경대전감기령민도적요구각불상동,여과침대불동령민도,분별채용MEMS공예비양화생산,칙회조성생산성본과고,경제화효익강저。본문이용습법부식적방법대전감기진행막편감박시험,재일정범위내제고료전감기적압력령민도,종이만족료불동적측시수구。막편감박후,전감기적령민도가체34.2 nm/kPa,압력표정곡선적선성도위0.9997,전감기적비선성오차위0.05%,능구실현0~120 kPa (절압)범위내압력적준학측량。
The fiber optic pressure sensors based on Fabry-Perot ( F-P ) interferometric principle are fabricated by employing the micro-eletromechanical system ( MEMS) . In practical application, different sensitivities are required in different testing environments. The cost of pro-duction will be excessive if the sensors are fabricated by MEMS with different sensitivities. In this paper, the thickness-reduction of the diaphragm in sensors is discussed, and the pressure sensitivity is improved within certain limits through the wet-etching. The sensitivity reached 34.2 nm/kPa after the reduction of the diaphragm thickness. The result of the pressure calibration shows that the linearity of the curve is 0.9997, and the non-linear error reaches 0.05% in the range of 0~120 kPa ( absolute pressure) .