CAJ | 학술논문

微振传感器在机械制造领域、生物科学领域，以及资源和环境领域都有着广泛的应用，特别在微加工和微制造领域有十分重要的作用。为了有效检测微振动信号，给出一种基于光强调制的全光纤双臂微振动传感器的设计与实验过程，并对传感系统的工作原理做了详细介绍。系统将两臂同时作为传感臂，不仅能够有效地消除温度对振动测量的交叉影响，同时能够提高测量的精度。
미진전감기재궤계제조영역、생물과학영역，이급자원화배경영역도유착엄범적응용，특별재미가공화미제조영역유십분중요적작용。위료유효검측미진동신호，급출일충기우광강조제적전광섬쌍비미진동전감기적설계여실험과정，병대전감계통적공작원리주료상세개소。계통장량비동시작위전감비，불부능구유효지소제온도대진동측량적교차영향，동시능구제고측량적정도。
Micro vibration sensor has a wide range of application in mechanical manufacturing field,biological science field,resources and environ-ment field,especially in micro machining and mi-cro manufacturing field.In order to effectively de-tect the micro vibration signal of the system,this paper presents the design and realization process of an all fiber and double arms micro vibration sensor which is based on light intensity modulation,and the working principle of the sensing system is in-troduced in detail.The sensor uses double arm structure which can effectively eliminate the cross effect caused by the change of temperature and it can also improve the accuracy of measurement.