上海计量测试
上海計量測試
상해계량측시
SHANGHAI MEASUREMENT AND TESTING
2014年
3期
23-25
,共3页
干涉仪%平面检测%球面检测%干涉条纹
榦涉儀%平麵檢測%毬麵檢測%榦涉條紋
간섭의%평면검측%구면검측%간섭조문
interferometer%flat plan test%lens test%interference fringe
介绍了数字式激光平面干涉仪的测量优势，阐述了利用其进行平面和球面面形的测量方法，弥补了传统平面等厚干涉仪只能测量平面平晶的不足。同时分析了影响测量结果的几个因素，并利用ZEMAX软件模拟平晶位置，观察干涉条纹。
介紹瞭數字式激光平麵榦涉儀的測量優勢，闡述瞭利用其進行平麵和毬麵麵形的測量方法，瀰補瞭傳統平麵等厚榦涉儀隻能測量平麵平晶的不足。同時分析瞭影響測量結果的幾箇因素，併利用ZEMAX軟件模擬平晶位置，觀察榦涉條紋。
개소료수자식격광평면간섭의적측량우세，천술료이용기진행평면화구면면형적측량방법，미보료전통평면등후간섭의지능측량평면평정적불족。동시분석료영향측량결과적궤개인소，병이용ZEMAX연건모의평정위치，관찰간섭조문。
The advantage of measurement using digital laser interferometer is introduced in the paper. The measurement method of the flat plane and the lens is explained, which makes up the deficiency of using the traditional flat equal thickness interferometer. Meanwhile it is analyzed several factors which may affect the measurement result. Simulating the standard optical flat by zemax, we can observe the change of the interference fringe.
