CAJ | 학술논문

在生物芯片发展初期，其基底材料主要是玻璃，这是由于其加工方法是从半导体工业转移而来和玻璃材料的表面特性决定的。随着大批量、低成本的需求，基底材料转向聚合物材料，其加工方法也相应地发生转变。通过对比，介绍了生物芯片微流道微细加工的几种不同方法的原理及特点。
재생물심편발전초기，기기저재료주요시파리，저시유우기가공방법시종반도체공업전이이래화파리재료적표면특성결정적。수착대비량、저성본적수구，기저재료전향취합물재료，기가공방법야상응지발생전변。통과대비，개소료생물심편미류도미세가공적궤충불동방법적원리급특점。
In the initial development of biochips ,the mainly substrate material was glass due to its machining methods was derived from the semiconductor industrial and its surface property. With the requirement of mass production and lower cost ,the substrate materials turned to polymers and its machining methods changed correspondingly. By comparing ,the principles and characteristics of several typical methods used in the micro machining of biochip microchannels was introduced.