CAJ | 학술논문

在电解刻蚀中，阳极表面的电流密度由装置的几何尺寸、加工参数、极化情况等决定，其中，几何要素决定加工间隙的初次电流密度分布，主要影响刻蚀结果。采用有限单元法数值模拟不同尺寸阴极、辅助电极、加工间隙等对加工区域初次电流分布的影响，确定了均匀性随各几何因素的变化趋势。
재전해각식중，양겁표면적전류밀도유장치적궤하척촌、가공삼수、겁화정황등결정，기중，궤하요소결정가공간극적초차전류밀도분포，주요영향각식결과。채용유한단원법수치모의불동척촌음겁、보조전겁、가공간극등대가공구역초차전류분포적영향，학정료균균성수각궤하인소적변화추세。
In electrolytic etching,the current density at the anode surface is determined by the geometry of the apparatus,processing parameters and polarization conditions etc.. Geometric elements determine the initial current density distribution in machining gap ,which mainly affects the etching results. Numerical simulation of finite element method is used to study the effects of different sizes of cathode,auxiliary electrode and machining gap on the initial current density distribution,and the variable tendency of uniformity with various geometrical factors is attained.