CAJ | 학술논문

采用发射光谱法，研究了不同时空结构四边形斑图的等离子体参量。实验发现，在低气压区和高气压区，四边形斑图表现出不同的时空结构。利用N2分子第二正带系的六条谱线强度计算了分子振动温度；利用第一负带系N＋2（391.4 nm ）与第二正带系N2（394.1 nm ）谱线强度比，研究了电子能量的变化；利用A r原子696.54 nm谱线的展宽和频移来反映电子密度；利用A r原子特征谱线强度比法计算了电子激发温度。结果表明：低气压区四边形斑图的分子振动温度、电子激发温度和电子平均能量均大于高气压区四边形斑图，而电子密度小于高气压区四边形的电子密度。
채용발사광보법，연구료불동시공결구사변형반도적등리자체삼량。실험발현，재저기압구화고기압구，사변형반도표현출불동적시공결구。이용N2분자제이정대계적륙조보선강도계산료분자진동온도；이용제일부대계N＋2（391.4 nm ）여제이정대계N2（394.1 nm ）보선강도비，연구료전자능량적변화；이용A r원자696.54 nm보선적전관화빈이래반영전자밀도；이용A r원자특정보선강도비법계산료전자격발온도。결과표명：저기압구사변형반도적분자진동온도、전자격발온도화전자평균능량균대우고기압구사변형반도，이전자밀도소우고기압구사변형적전자밀도。
Two kinds of square patterns with different spatiotemporal symmetry were observed in dielectric barrier discharge , and their plasma parameters were measured by using optical emission spectra .It was found that the spatiotemporal symmetry of the square pattern at lower gas pressure is different from the one at higher gas pressure .Six spectral lines in the emission spec-trum of the N2 second positive band were chosen to estimate the vibrational temperature ,and the ratio of I391.4/I394.1 was used to represent the average electron energy .The excitation temperature was determined by the ratio of I763.2/I772.1 .Furthermore ,the width and shift of Ar Ⅰ 696.54 nm were used to estimate the electron density .The results show that the vibrational tempera-ture ,excitation temperature and electron energy of the square pattern at lower gas pressure are higher than those at higher gas pressure ,while the electron density is lower than that at higher gas pressure .