CAJ | 학술논문

利用有限元分析软件对离子注入机线包的温度场进行了数值计算，发现4个60匝50 m m高的线圈即可产生所需磁场。同时对处于水冷板与铜线圈之间的绝缘树脂的厚度和导热系数对线圈温度场的影响进行了研究，发现绝缘树脂厚度的增加会使线圈温度急剧升高，而选择高导热系数的绝缘树脂可以显著降低线圈温度。因此需要在制作线包时要严格保证树脂厚度，同时尽量选取导热性能好的绝缘树脂。
이용유한원분석연건대리자주입궤선포적온도장진행료수치계산，발현4개60잡50 m m고적선권즉가산생소수자장。동시대처우수랭판여동선권지간적절연수지적후도화도열계수대선권온도장적영향진행료연구，발현절연수지후도적증가회사선권온도급극승고，이선택고도열계수적절연수지가이현저강저선권온도。인차수요재제작선포시요엄격보증수지후도，동시진량선취도열성능호적절연수지。
In this paper,we calculate the tem perature field of ion im plantater mass analyzer coil with the finite elem ent analysis softw are. The result shows that four 60-turn coil 50m m high can produce the required m agnetic field. We studied the influence of the thickness and thermal conductivity of the insulating resin,found that increase the thickness of the insulating resin can cause the tem perature of the coil sharp rise,and the high therm al conductivity of the insulating resin can significantly reduce the coil temperature. The refore,we need to strictly ensure the thickness and therm all conductivity of the insulating resin when produce the coil.