CAJ | 학술논문

随着太赫兹（THz）技术的发展，真空电子器件越来越小型化，作为核心部件的折叠波导由于具有独特的优点，在高频结构中必将得到广泛的应用。开展了基于SU8厚胶，采用嵌丝式UV-LIGA工艺制备折叠波导（FWG）互作用结构的工艺实验，主要包括无氧铜基体的制备、SU8厚胶的匀胶、烘胶、光刻、后烘、显影等工艺参数的摸索。
수착태혁자（THz）기술적발전，진공전자기건월래월소형화，작위핵심부건적절첩파도유우구유독특적우점，재고빈결구중필장득도엄범적응용。개전료기우SU8후효，채용감사식UV-LIGA공예제비절첩파도（FWG）호작용결구적공예실험，주요포괄무양동기체적제비、SU8후효적균효、홍효、광각、후홍、현영등공예삼수적모색。
Vacum electronic devices are smaller and smaller with the development of THz technology,the folded waveguide will be widely used in vacuum devices because of its upstanding capability. This paper fabricated circuits structures for folded waveguide utilized embedded monofilament UV-LIGA techniques. Mainly technical process include substrate design,coat,softbake, UV-exposure,postbake,development and so on.