CAJ | 학술논문

提出了基于液膜电化学加工原理制备尖锥形和大长径比探针的方法。分析了液膜电化学加工方法的机理，并采用静态液膜法制备出针尖曲率半径为40 nm的尖锥形探针，再通过动态液膜电化学加工方法，即在工件阳极施加往复直线运动的方法制备出具有大长径比的探针。对动态液膜法的成形机理进行了阐述，通过试验分析得出加工电压、电解液浓度、运动参数等对探针长径比和平均直径的影响规律，并制备出长径比达70、平均直径为300 nm的大长径比探针。
제출료기우액막전화학가공원리제비첨추형화대장경비탐침적방법。분석료액막전화학가공방법적궤리，병채용정태액막법제비출침첨곡솔반경위40 nm적첨추형탐침，재통과동태액막전화학가공방법，즉재공건양겁시가왕복직선운동적방법제비출구유대장경비적탐침。대동태액막법적성형궤리진행료천술，통과시험분석득출가공전압、전해액농도、운동삼수등대탐침장경비화평균직경적영향규률，병제비출장경비체70、평균직경위300 nm적대장경비탐침。
This paper proposed methods for the fabrication of conical and high-aspect-ratio probes, based on the liquid membrane ECM. The principle of liquid membrane ECM has been analyzed, and the conical shape probe with the tip radius of curvature of 40 nm was processed using static liquid membrane ECM. Furthermore, the dynamic liquid membrane ECM which applied the straight reciprocating motion to the anode was employed to fabricating high-aspect-ratio probe. The machining mechanism of the dynamic liquid membrane ECM was explored, and experiments were conducted to investigate the influence of the applied voltage, electrolyte concentration and kinematics parameters including amplitude and velocity on the fabricated probes. By using the optimal parameters, probes with aspect ratio of up to 70 and average diameter of 300 nm were successfully obtained.