CAJ | 학술논문

提出了一种新型的摇动质量增强压电体声波固体波动圆盘微陀螺。该种陀螺，在结构上采用完全对称的圆盘式结构，在原理上，利用压电体声波的简并模态，而且摇动质量又增强体声波驱动和敏感效应，再由柯氏效应，获得输入角速度。文章介绍了结构，原理，同时又利用仿真分析，优化了参数，给出了该陀螺可有效工作在25172．8 Hz的体声波二波腹模式下，频率分裂184．6 Hz，具有陀螺效应，仿真得到灵敏度为1．81μV/rad/s。最后，利用MEMS技术，对微陀螺进行了实际加工，并得到了样品。
제출료일충신형적요동질량증강압전체성파고체파동원반미타라。해충타라，재결구상채용완전대칭적원반식결구，재원리상，이용압전체성파적간병모태，이차요동질량우증강체성파구동화민감효응，재유가씨효응，획득수입각속도。문장개소료결구，원리，동시우이용방진분석，우화료삼수，급출료해타라가유효공작재25172．8 Hz적체성파이파복모식하，빈솔분렬184．6 Hz，구유타라효응，방진득도령민도위1．81μV/rad/s。최후，이용MEMS기술，대미타라진행료실제가공，병득도료양품。
Here,a new type of gyroscope with a completely symmetrical disk was proposed based on an out-of-plane degeneracr mode of bulk acoustic wave.It was used to aim at detecting an angular velocity with Coriolis effect.The bulk acoustic wave driving and sensing were combined in the device.The rocking mass was designed to enhance the driving and sensing efficiency.The structure and working principle of the gyroscope were introduced and then simulation and analysis followed.By parametric optimization,it was shown that this type of gyroscope with proper parameters can work according to a bulk acoustic wave model with double antinodes and it can be used to detect an angular velocity;through simulation analysis,its operation frequency is 25172.8Hz with small frequency split 184.6Hz and its sensitivity is 1.81μV/rad/s.At last ,the micro gyroscope prototype was fabricated.