中国机械工程
中國機械工程
중국궤계공정
CHINA MECHANICAl ENGINEERING
2014年
13期
1773-1777,1778
,共6页
潘慧君%刘志东%邱明波%田宗军
潘慧君%劉誌東%邱明波%田宗軍
반혜군%류지동%구명파%전종군
半导体%电火花%爬坡电流%接触电阻
半導體%電火花%爬坡電流%接觸電阻
반도체%전화화%파파전류%접촉전조
semiconductor%electrical discharge machining(EDM)%climbing current%contact resist-ance
对单晶硅电火花加工过程中的电流爬坡式上升现象进行了研究,结果表明,爬坡式电流主要是由加工过程中接触电阻的变化引起的,而接触电阻主要由高温区的接触面积决定。对爬坡式电流曲线的性质进行了研究,分析了温度、热导率和相变能量对接触电阻和放电电流变化的影响。最后,研究了电参数对加工效率的影响,结果表明采用大脉宽、高电压和小占空比能够大大提高加工效率。
對單晶硅電火花加工過程中的電流爬坡式上升現象進行瞭研究,結果錶明,爬坡式電流主要是由加工過程中接觸電阻的變化引起的,而接觸電阻主要由高溫區的接觸麵積決定。對爬坡式電流麯線的性質進行瞭研究,分析瞭溫度、熱導率和相變能量對接觸電阻和放電電流變化的影響。最後,研究瞭電參數對加工效率的影響,結果錶明採用大脈寬、高電壓和小佔空比能夠大大提高加工效率。
대단정규전화화가공과정중적전류파파식상승현상진행료연구,결과표명,파파식전류주요시유가공과정중접촉전조적변화인기적,이접촉전조주요유고온구적접촉면적결정。대파파식전류곡선적성질진행료연구,분석료온도、열도솔화상변능량대접촉전조화방전전류변화적영향。최후,연구료전삼수대가공효솔적영향,결과표명채용대맥관、고전압화소점공비능구대대제고가공효솔。
The phenomenon of climbing type current in semiconductor EDM was studied.Results show that the main influence factor that leads to the climbing type current is the changes of the con-tact resistance.The value of contact resistance is decided by the contact area of the high-temperature region.Properties of climbing type current curve were researched and the influences of temperature, thermal conductivity and phase change energy on contact resistance and current were discussed.At last,the influences of electric parameters on the machining process were researched.It is found that big pulse width,high voltage and small duty ratio can increase the processing efficiency greatly.