CAJ | 학술논문

以纳米氧化铟锡(ITO)粉末为原料，采用离心喷雾造粒技术制备高性能ITO造粒粉体，通过SEM、激光粒度仪及松装密度仪等手段研究浆料固相含量、粘结剂含量及雾化器转速对干燥粉体形貌、粒径分布、流动性和松装密度的影响。结果表明：当浆料固相含量为50%、粘结剂为1%、雾化器转速为10800 r/min时，喷雾造粒得到的ITO粉体成球率较高、粒径分布均匀、松装密度和流动性显著提高。用该ITO造粒粉末经冷等静压成形制坯和常压烧结制备靶材，压坯和烧结坯的致密度可达到61.7%和99.27%。
이납미양화인석(ITO)분말위원료，채용리심분무조립기술제비고성능ITO조립분체，통과SEM、격광립도의급송장밀도의등수단연구장료고상함량、점결제함량급무화기전속대간조분체형모、립경분포、류동성화송장밀도적영향。결과표명：당장료고상함량위50%、점결제위1%、무화기전속위10800 r/min시，분무조립득도적ITO분체성구솔교고、립경분포균균、송장밀도화류동성현저제고。용해ITO조립분말경랭등정압성형제배화상압소결제비파재，압배화소결배적치밀도가체도61.7%화99.27%。
The indium-tin oxide (ITO) granulation powders were prepared by centrifugal spray drying process with nanometer ITO powders. The effects of solid loading and binder content and rotation rate of spray head on the morphology, diameter distribution, flow rate, packing density of the spray dried granules were examined by SEM, laser particle size analyzer and bulk density meter. The results show that the optimal operation parameters are obtained for preparing high spherical particles and uniform size distribution:solids content of slurry is 50%, the binder concentration is 1%and the rotation frequency of spray head is 10 800 r/min, the flow rate and packing densities have risen notably. The relative density of the ITO green body and ITO target run up to 61.7%and 99.27%after cold isostaic compaction and normal pressure sintering method.