CAJ | 학술논문

采用粉末微注射成形技术制得 ZrO2阵列式微流道，研究粉末粒径和注射成形工艺对微流道性能的影响规律。结果表明：通过优化注射工艺参数可以有效避免注射坯中缺陷的产生；不同粉末粒径的试样烧结后，致密度和力学性能均随烧结温度的升高先增大后减小；中位粒径为200 nm粉末粒径的试样最佳烧结温度为1500℃，致密度为99.5%；中位粒径为100 nm粉末粒径的试样最佳烧结温度为1250℃，致密度为98.4%，均近完全致密。纳米级粉末的使用可有效降低烧结温度、提高力学性能；粉末粒径从200 nm下降到100 nm时，粗糙度值从1.92下降到1.32。烧结后的阵列式微流道的直径为(450±5)μm，具有很好的圆度，尺寸误差＜1.5%。
채용분말미주사성형기술제득 ZrO2진렬식미류도，연구분말립경화주사성형공예대미류도성능적영향규률。결과표명：통과우화주사공예삼수가이유효피면주사배중결함적산생；불동분말립경적시양소결후，치밀도화역학성능균수소결온도적승고선증대후감소；중위립경위200 nm분말립경적시양최가소결온도위1500℃，치밀도위99.5%；중위립경위100 nm분말립경적시양최가소결온도위1250℃，치밀도위98.4%，균근완전치밀。납미급분말적사용가유효강저소결온도、제고역학성능；분말립경종200 nm하강도100 nm시，조조도치종1.92하강도1.32。소결후적진렬식미류도적직경위(450±5)μm，구유흔호적원도，척촌오차＜1.5%。
ZrO2 microchannel array was manufactured by powder micro-injection molding. The effects of particle size, injection parameters and sinter process on the relative density and mechanical properties were analyzed. The results show that forming defects can be removed through optimizing the injection parameters. The relative density and mechanical properties increase firstly and then decrease with increasing the sintering temperature. The optimum sintering temperature of ZrO2 microchannel array using 100nm and 200 nm powders are 1 250 ℃ and 1 500 ℃, respectively. The relative density is 99.5% for using 100 nm powders and 98.4% for 200 nm powders at optimum sintering temperature. The sintering temperatures are decreased and the mechanical properties are improved effectively for the sintered ceramic samples by using nano-order powders. The roughness of sintered ceramic microchannel array drops from 1.92 to 1.32 with decreasing the particle size from 200 nm to 100 nm. Sintered microchannel arrays with the diameter of (450±5)μm possess good roughness and low diameter deviation (<1.5%).