CAJ | 학술논문

在有限元模型基础上，运用 ANSYS软件对阴极真空电弧沉积系统中阴极表面磁场分布以及传输导管内部磁场进行了模拟计算，研究了阴极表面附近磁场分布对于电弧稳定性和等离子体输运效率的影响。计算和试验结果表明，调节阴极后部的永磁铁至合理位置以及在阳极筒外侧加聚焦线圈两项措施均能够改变阴极表面磁场分布。而对阴极表面磁场的合理优化有利于电弧稳定，并能极大地提高等离子体传输效率，对于提高沉积效率具有重要意义。
재유한원모형기출상，운용 ANSYS연건대음겁진공전호침적계통중음겁표면자장분포이급전수도관내부자장진행료모의계산，연구료음겁표면부근자장분포대우전호은정성화등리자체수운효솔적영향。계산화시험결과표명，조절음겁후부적영자철지합리위치이급재양겁통외측가취초선권량항조시균능구개변음겁표면자장분포。이대음겁표면자장적합리우화유리우전호은정，병능겁대지제고등리자체전수효솔，대우제고침적효솔구유중요의의。
Magnetic field distribution on cathode surface in a filtering cathode vacuum arc (FCVA)system as well as internal magnetic field in transmission duct were modeled and simulated with software ANSYS. Established finite element model was used to analyze effects of cathode surface magnetic field distribution on stability of electric arc and efficiency of plasma beam transport.Simulations showed that by adj usting the position of permanent magnet behind the cathode to an appropriate position and adding a focus coil outside the anode tube can both significantly improve magnetic field distribution on cathode surface. Reasonable optimization of magnetic field distribution on cathode surface is propitious to arc stiffness.It can greatly improve plasma transport and deposition efficiency.