CAJ | 학술논문

以异丙醇铝为前驱体，HNO3为胶溶剂，采用溶胶-凝胶法制备Al2O3膜。考察HNO3浓度对溶胶及薄膜的影响，通过 TG-DTG，XRD，AFM，BET 等表征手段对溶胶的稳定性及黏度，薄膜的热稳定性，物相组成，表面形貌，微孔结构及分布等进行综合分析。结果表明：随HNO3浓度增大，溶胶黏度增大，HNO3浓度为5 mol/L时溶胶发生团聚；薄膜的热稳定性较好，高于500℃加热薄膜几乎没有质量损失；随烧结温度升高，薄膜中的γ-AlOOH逐渐向γ-Al2O3转变，薄膜因此变得更加稳定；薄膜表面较为平整，微孔分布均匀，平均孔直径为4.22 nm。
이이병순려위전구체，HNO3위효용제，채용용효-응효법제비Al2O3막。고찰HNO3농도대용효급박막적영향，통과 TG-DTG，XRD，AFM，BET 등표정수단대용효적은정성급점도，박막적열은정성，물상조성，표면형모，미공결구급분포등진행종합분석。결과표명：수HNO3농도증대，용효점도증대，HNO3농도위5 mol/L시용효발생단취；박막적열은정성교호，고우500℃가열박막궤호몰유질량손실；수소결온도승고，박막중적γ-AlOOH축점향γ-Al2O3전변，박막인차변득경가은정；박막표면교위평정，미공분포균균，평균공직경위4.22 nm。
Using isopropanol aluminum as precursor, HNO3 as peptizator, Al2O3 membranes were prepared by Sol-Gel method. The effect of concentration of HNO3 on the sol and membrane was studied. A comprehensive analysis of the stability of the sol, the thermal stability of the membrane, phase composition, surface morphology, pore structure and distribution were conducted by characterization means of sol viscosity, TG-DTG, XRD, AFM and BET. The results show that, with increasing concentration of HNO3, sol viscosity increases, reunion appears when HNO concentration is 5 mol/L;Al2O3 membrane has good thermal stability, it almost has no mass loss after 500 ℃; With increasing sintering temperature, γ-AlOOH in the membrane gradually transforms to γ-Al2O3, and membrane becomes more stable; the surface of Al2O3 membrane is relatively smooth, pore distribution is uniform, the average pore diameter is 4.22 nm.