CAJ | 학술논문

在含有钛酸丁酯、乙醇及HCl的溶液中液相等离子体电沉积制取金属钛膜,研究了电流密度、电解液组成配比、HCl浓度和电极间距等参数对钛膜形貌及微观结构的影响,得到电解液组成最佳配比为钛酸丁酯：乙醇： HCl =25：74.5：0.5,最佳电流密度为700mA/mm2,最佳电极间距为10mm. SEM测试结果表明薄膜的表面形貌是平整光滑且具有金属光泽的膜层结构.
재함유태산정지、을순급HCl적용액중액상등리자체전침적제취금속태막,연구료전류밀도、전해액조성배비、HCl농도화전겁간거등삼수대태막형모급미관결구적영향,득도전해액조성최가배비위태산정지：을순： HCl =25：74.5：0.5,최가전류밀도위700mA/mm2,최가전겁간거위10mm. SEM측시결과표명박막적표면형모시평정광활차구유금속광택적막층결구.
This paper uses liquid phase plasma deposition to produce metal titanium with the composition of electrolyte, including butyl titanate, ethanol and HCl. Overall research is studied on the liquid phase plasma electro deposition parameters, as current density, electrolyte concentration, HCl concentration and electrode space. According to affects, we determine the best compose of butyl titanate(25% vol),ethanol(74.5% vol),HCl(0.5%),the best state of the current density is 700 mA/mm2and the best electrode gap is 10 mm. Electron microscopy, energy spectrometer is used to analyze the membrane morphology, microstructure, and we get that the film is smooth and flat membrane layer structure with metallic luster.