CAJ | 학술논문

利用激光技术对表界面性能进行检测与调控，可极大提升薄膜界面结合性能，保证薄膜的质量。阐述了国内和国际上对激光技术在表界面性能检测与调控中应用的最新研究动态，重点论述了激光层裂技术、激光划痕技术、激光调控技术以及这些技术在表界面性能应用中的优缺点及遇到的主要问题。在此基础上指出进一步扩大激光技术在表界面性能检测和调控中的应用将是薄膜制作和发展的一个重大趋势，必将成为国内和国际研究的热点问题。
이용격광기술대표계면성능진행검측여조공，가겁대제승박막계면결합성능，보증박막적질량。천술료국내화국제상대격광기술재표계면성능검측여조공중응용적최신연구동태，중점논술료격광층렬기술、격광화흔기술、격광조공기술이급저사기술재표계면성능응용중적우결점급우도적주요문제。재차기출상지출진일보확대격광기술재표계면성능검측화조공중적응용장시박막제작화발전적일개중대추세，필장성위국내화국제연구적열점문제。
With the help of detection and control of the film-substrate interface properties by laser technology , it could greatly enhance the combined performance of films and guarantee the quality of films. In this paper , the new trends of laser process technologies used for detection and control of the film-substrate interface properties were stated, especially, laser spallation technology, laser scratch technology, control the surface residual stress by laser technology. Based on above mentioned, the research on laser technology in detection and control of the film-substrate interface properties was not enough sufficient. No effective means have been proposed to overcome these encounter problems, but it will be a new trend in the making and development of film in the furture research, and still remains to be a hot issue in China and abroad.