CAJ | 학술논문

为了提高非球面光学元件的检测精度及效率，缩短调整环节的时间，分析了非球面干涉检测过程中被检非球面镜的调整误差对检测结果波前信息的影响，提出利用波前等高线图走势准确判断调整方向的调整方法。建立调整方向与被检镜失调量之间的关系，并利用光学设计软件Zemax仿真模拟检测光路，结合二次非球面镜的光学公差分析判断调整量的大小。基于该调整方法，利用Zygo激光干涉仪对口径为50 mm的双曲面进行检测，最终检测结果是RMS为0．014λ，实验表明该方法简单、可行。
위료제고비구면광학원건적검측정도급효솔，축단조정배절적시간，분석료비구면간섭검측과정중피검비구면경적조정오차대검측결과파전신식적영향，제출이용파전등고선도주세준학판단조정방향적조정방법。건립조정방향여피검경실조량지간적관계，병이용광학설계연건Zemax방진모의검측광로，결합이차비구면경적광학공차분석판단조정량적대소。기우해조정방법，이용Zygo격광간섭의대구경위50 mm적쌍곡면진행검측，최종검측결과시RMS위0．014λ，실험표명해방법간단、가행。
In order to improve the testing accuracy and efficiency of aspheric surface optical ele-ments and reduce the adjusting time ,the influence of adjustment error of testing elements in aspheric surface interference measurement on wavefront information of testing result was ana-lyzed .T he adjustment method w hich could judge the adjustment orientation accurately by tak-ing advantage of the wavefront contour map trend was presented on this basis .The relation be-tween adjustment orientation and alignment amount of testing elements was established .Using the optical design software Zemax ,the measuring ray path of a conic aspheric surface was simu-lated ,and the amount of adjustment was determined through analyzing the tolerance .Accord-ing to this method ,a hyperbolic mirror with an aperture of 50 mm was tested by Zygo laser in-terferometer ,and the final testing result was 0 .014 λ(RMS) .Experiments show that the method is simple and feasible .