CAJ | 학술논문

采用单点金刚石飞刀加工可以直接加工出具有纳米级的表面粗糙度和亚微米级形状精度的光学微结构元件而不需要后续处理。通过超精密飞刀加工微V沟槽的实验，分析了主轴转速、进给速度、切削深度和切削行间距对微V沟槽加工精度的影响，并对切削参数进行优化。最后，利用优化后的切削参数加工出微V沟槽结构。实验结果显示，超精密飞刀加工微V沟槽可达到满足光学微结构加工精度的要求。
채용단점금강석비도가공가이직접가공출구유납미급적표면조조도화아미미급형상정도적광학미결구원건이불수요후속처리。통과초정밀비도가공미V구조적실험，분석료주축전속、진급속도、절삭심도화절삭행간거대미V구조가공정도적영향，병대절삭삼수진행우화。최후，이용우화후적절삭삼수가공출미V구조결구。실험결과현시，초정밀비도가공미V구조가체도만족광학미결구가공정도적요구。
Fly-cutting with single crystal diamond cutting tool was used for the fabrication of optical microstructure components with nano-surface finish and sub-micron form accuracy without the need for any subsequent post polishing. By experimental fabrication of micro V-groove in ultra-precision fly-cutting,the effects of the spindle speed,feed rate,cut depth and cut distance factors affecting machining accuracy of micro V-groove were analyzed,and the cutting parameters were optimized. A micro V-groove array was pro-cessed with using of optimized cutting parameters. The experimental results show that the machining of V-groove structures in ultra-pre-cision fly-cutting meets the requirement of the optical microstructure.