CAJ | 학술논문

随着微纳米测量系统中测头微探球尺寸的不断减小和测量不确定度要求的不断提高，测力所引起的力变形误差对测量系统不确定度有着不可忽略的影响。根据 Hertz理论，构建了微探球与工件接触时的接触模型、微探球与试样力变形模型，给出了最大允许测力估计方法和力变形计算方法。以现有的3种微纳米三坐标测量机微探球为参考，分别估计了允许最大测力及引起的力变形。结果表明，对于纳米量级测量不确定要求，接触式测量中微探球的受力变形误差是不可忽略的。
수착미납미측량계통중측두미탐구척촌적불단감소화측량불학정도요구적불단제고，측력소인기적력변형오차대측량계통불학정도유착불가홀략적영향。근거 Hertz이론，구건료미탐구여공건접촉시적접촉모형、미탐구여시양력변형모형，급출료최대윤허측력고계방법화력변형계산방법。이현유적3충미납미삼좌표측량궤미탐구위삼고，분별고계료윤허최대측력급인기적력변형。결과표명，대우납미량급측량불학정요구，접촉식측량중미탐구적수력변형오차시불가홀략적。
As the size of microball used for micro-nano measurement system decreased continuous-ly and the uncertainty of measurement in nanometer measurement should be improves constantly ,the influence of deformation caused by measurement force on the uncertainty of the measurement system was becoming an issue gradually that could not be ignored .Herein ,the contact model between the mi-croball and the workpiece ,and the force deformation model of microball and workpiece were built based on Hertz theory ,and then the estimation method of maximum allowable measurement force and the force deformation were given .Microballs made of three kinds of material ,which were used for mi-cro-nano CMM were selected as reference ,the maximum allowable measurement force and the deform-ation were estimated .The results show that the errors of force deformation should not to be ignored and needs to be paid more attention in contact nano-measurement .