CAJ | 학술논문

采用阳极氧化技术和射频磁控溅射技术在NiTi 合金表面分别制备了 TiO2薄膜以及 Ti/TiN/TiO2多层薄膜。借助扫描电子显微镜(SEM)、X射线衍射仪(XRD)、摩擦磨损试验仪及电化学工作站等仪器对薄膜的形貌、结构、摩擦磨损性能及耐腐蚀性能进行了研究。结果表明,NiTi 合金经表面处理后,其摩擦磨损性能和耐腐蚀性能均得以不同程度的改善,其中阳极氧化和磁控溅射复合处理的 NiTi 合金的耐磨性和耐蚀性具有最佳的配合。
채용양겁양화기술화사빈자공천사기술재NiTi 합금표면분별제비료 TiO2박막이급 Ti/TiN/TiO2다층박막。차조소묘전자현미경(SEM)、X사선연사의(XRD)、마찰마손시험의급전화학공작참등의기대박막적형모、결구、마찰마손성능급내부식성능진행료연구。결과표명,NiTi 합금경표면처리후,기마찰마손성능화내부식성능균득이불동정도적개선,기중양겁양화화자공천사복합처리적 NiTi 합금적내마성화내식성구유최가적배합。
In this paper,the TiO2 film and Ti/TiN/TiO2 multilayers were prepared by anodic oxidation and RF magnetron sputtering technology on surface of NiTi shape memory alloy,respectively.The structure and sur-face morphology of films were systematically studied by X ray diffracmeter (XRD)and scanning electron micro-scope (SEM);friction/wear and corrosion resistance properties were researched by friction and wear spectrome-ter and electrochemical workstation.The result showed that,the friction/wear and corrosion resistance proper-ties were improved in varying degrees after surface treatment.And the multilayers which was deposited on NiTi alloy by RF reactive magnetron sputtering after the method of constant voltage anodization had optimal friction/wear and corrosion resistance properties.