CAJ | 학술논문

基于悬臂梁振动和纯弯曲理论，提出测试薄膜弯曲疲劳寿命的简易实验方法。将待检测的薄膜沉积在一定尺寸的金属片上作为试样，外力驱动试样作悬臂梁一阶弯曲受迫振动，通过光学显微镜观察其表面的薄膜是否开裂或剥落，确定薄膜的疲劳寿命，理论计算获得应力分布。以CoCrMo为基体材料研究了TiO2薄膜的疲劳特性。
기우현비량진동화순만곡이론，제출측시박막만곡피로수명적간역실험방법。장대검측적박막침적재일정척촌적금속편상작위시양，외력구동시양작현비량일계만곡수박진동，통과광학현미경관찰기표면적박막시부개렬혹박락，학정박막적피로수명，이론계산획득응력분포。이CoCrMo위기체재료연구료TiO2박막적피로특성。
A simple experimental method was proposed to determine the bending fatigue life of thin film according to cantilever beam vibration theory and pure bending theory .The sample film was deposited on metal substrate .When driven by external force ,the sample’s vibration could be treated as cantilever beam’s first-order force vibration .The status of the sample was monitored by optical mi-croscope to determine the bending fatigue life .The stress distribution was calculated theoretically . The bending fatigue life of TiO2 film deposited on CoCrMo substrate was studied .