活性环境空心阴极溅射特性与沉积Al2O3、ZnO掺杂和In2O3:Mo薄膜的应用(中)活性環境空心陰極濺射特性與沉積Al2O3、ZnO摻雜和In2O3:Mo薄膜的應用(中) 활성배경공심음겁천사특성여침적Al2O3、ZnO참잡화In2O3:Mo박막적응용(중) Reactive-environment, hollow cathode sputtering: Basic characteristics and application to Al2O3, doped ZnO, and In2O3:Mo.Journal of Vacuum Science & Technology A
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太阳能太暘能태양능 SOLAR ENERGY 2014年7期16-18,22,共4页
Delahoy A E%Guo S Y%Paduraru C%范崇治Delahoy A E%Guo S Y%Paduraru C%範崇治
